Ion Beam Analysis and NanoSciences
Institut des nanosciences de Paris (INSP)
Abstract: For many years IBA with a depth resolution of around 10nm and spatial resolution for scanning/focussed beams of the order of 1 micron was adequate for application to many thin film and materials science problems and a vast array of geological, biological, medical, environmental and cultural heritage problems. However over the last decade or two, the materials science systems of interest have evolved more and more to nanoscale structures in 1, 2 or 3 dimensions. In some special cases high depth resolution has been achieved with IBA - MEIS, resonance depth profiling, high energy resolution detection systems and so on, however in parallel, other analytical techniques have continued to evolve and offer relevant elemental and structural characterisation. I will give a personal view of where IBA fits into the overall nanoscale characterisation ecosystem, and highlight some recent developments of IBA, which is also evolving to meet the characterisation challenges of the nanosciences.